課程名稱 |
奈米光機電系統 Optical Nano-electro-mechanical System |
開課學期 |
102-1 |
授課對象 |
電機資訊學院 光電工程學研究所 |
授課教師 |
蔡睿哲 |
課號 |
OE5027 |
課程識別碼 |
941EU0360 |
班次 |
|
學分 |
3 |
全/半年 |
半年 |
必/選修 |
選修 |
上課時間 |
星期三2,3,4(9:10~12:10) |
上課地點 |
電二104 |
備註 |
本課程以英語授課。 總人數上限:30人 |
Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/1021moems |
課程簡介影片 |
|
核心能力關聯 |
核心能力與課程規劃關聯圖 |
課程大綱
|
為確保您我的權利,請尊重智慧財產權及不得非法影印
|
課程概述 |
The major topics include:
1) Introduction: development from MEMS to NEMS
2) Fabrication technologies of micro devices and nano-etch technology
3) Governing physics in micro/nano world, actuation mechanisms, and mechanical structures
4) Short introduction to optics in free space and waveguides
5) Optical MEMS/NEMS devices and case studies
6) Presentations and/or reports by students |
課程目標 |
This course will focus on micro/nano devices and their applications. The material will cover the principles, designs, and fabrication processes behind this emerging technology. |
課程要求 |
成績評量方式:
Midterm Exam
Final Exam
Project |
預期每週課後學習時數 |
|
Office Hours |
另約時間 |
指定閱讀 |
|
參考書目 |
教科書:
參考書目: - Marc J. Madou, "Fundamentals of Microfabrication: The Science of Miniaturization," Second Edition, CRC Press (ISBN: 0-8493-0826-7), 2002.
- Steve Senturia, "Microsystem Design," Kluwer Academic Publishers, 2001
- Gregory T. A. Kovacs, "Micromachined Transducers - Sourcebook," WCB McGraw-Hill, 1998.
- Reading Assignment
|
評量方式 (僅供參考) |
No. |
項目 |
百分比 |
說明 |
1. |
Midterm |
30% |
|
2. |
Final |
40% |
|
3. |
Project |
30% |
|
|
|